Defect engineering of single- and few-layer MoS2 by swift heavy ion irradiation

Author(s)

Lukas Madauß, Oliver Ochedowski, Henning Lebius, Brigitte Ban-d'Etat, Carl H. Naylor, A T Charlie Johnson, Jani Kotakoski, Marika Schleberger

Abstract

We have investigated the possibility to use swift heavy ion irradiation

for nano-structuring supported and freestanding ultra-thin MoS₂ samples. Our comprehensive study of the ion-induced morphological changes in various MoS₂

samples shows that depending on the irradiation parameters a multitude

of extended defects can be fabricated. These range from chains of

nano-hillocks in bulk-like MoS₂, and foldings in single and bilayer MoS₂, to unique nano-incisions in supported and freestanding single layers of MoS₂.

Our data reveals that the primary mechanism responsible for the

incisions in the ultrathin supported samples is the indirect heating by

the SiO₂ substrate. We thus conclude that an energy of less

than 2 keV per nm track length is sufficient to fabricate nano-incisions

in MoS₂ which is compatible with the use of the smallest accelerators.

Organisation(s)

Physics of Nanostructured Materials

External organisation(s)

Universität Duisburg-Essen, CIMAP - Centre de recherche sur les Ions, les MAtériaux et la Photonique, University of Pennsylvania

Journal

2D Materials

Volume

4

No. of pages

10

ISSN

2053-1583

DOI

https://doi.org/10.1088/2053-1583/4/1/015034

Publication date

12-2016

Peer reviewed

Yes

Austrian Fields of Science 2012

103009 Solid state physics

Keywords

ASJC Scopus subject areas

Condensed Matter Physics, Mechanics of Materials, Mechanical Engineering, Chemistry(all), Materials Science(all)

Portal url

https://ucris.univie.ac.at/portal/en/publications/defect-engineering-of-single-and-fewlayer-mos2-by-swift-heavy-ion-irradiation(1102b6d6-2fd0-49cc-80d5-a401f09935e4).html